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DLTS of p-type Czochralski Si wafers containing processing-induced macropores
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DLTS of p-type Czochralski Si wafers containing processing-induced macropores
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Depauw, Valerie
;
Gordon, Ivan
;
Poortmans, Jef
Journal
Semiconductor Science and Technology
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1847
since deposited on 2021-10-20
Acq. date: 2025-12-18
Citations
Metrics
Views
1847
since deposited on 2021-10-20
Acq. date: 2025-12-18
Citations