DLTS of p-type Czochralski Si wafers containing processing-induced macropores

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Authors

Simoen, Eddy; Depauw, Valerie; Gordon, Ivan; Poortmans, Jef

ISSN

0268-1242

Issue

1

Journal

Semiconductor Science and Technology

Volume

27

Title

DLTS of p-type Czochralski Si wafers containing processing-induced macropores

Publication type

Journal article

Embargo date

9999-12-31

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