Publication:

Scaling the Ge gate stack: Towards sub 1nm EOT

Date

2012

Journal article

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Files

25829.pdf 917.47 KB

Author(s)

;

;

Delabie, Annelies

;

Conard, Thierry

;

Struyf, Herbert

;

De Gendt, Stefan

;

Journal

ECS Journal of Solid State Science and Technology

Statistics

1843 since deposited on 2021-10-20

1last month

Acq. date: 2026-06-06