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Interplay between plasma modification of surfaces & atomic layer deposition for semiconductor applications
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Authors
Swerts, Johan
;
Adelmann, Christoph
;
Armini, Silvia
;
Delabie, Annelies
;
Nyns, Laura
;
Popovici, Mihaela Ioana
;
Schaekers, Marc
;
Verdonck, Patrick
;
Van Elshocht, Sven
Conference
ECS Fall Meeting Symposium E13: Plasma Processing 19
Title
Interplay between plasma modification of surfaces & atomic layer deposition for semiconductor applications
Publication type
Meeting abstract
Embargo date
9999-12-31
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