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Impact of the plasma ambient and the ruthenium precursor on the growth of ruthenium films by plasma enhanced atomic layer deposition
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1768 since deposited on 2021-10-20
6last month
Acq. date: 2025-12-16
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Views
1768 since deposited on 2021-10-20
6last month
Acq. date: 2025-12-16
Citations