ToF-SIMS and XPS characterization of plasma etch residues on cobalt silicide surfaces

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Authors
Storm, Wolfgang; Vandervorst, Wilfried; Vanhaelemeersch, Serge; Baklanov, Mikhaïl; Maex, Karen; Poleunis, C.; Bertrand, P.
Conference
Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference
Title
ToF-SIMS and XPS characterization of plasma etch residues on cobalt silicide surfaces
Publication type
Proceedings paper
Embargo date
9999-12-31
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