Publication:

ToF-SIMS and XPS characterization of plasma etch residues on cobalt silicide surfaces

Date

1997

Proceedings Paper

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Files

2135.pdf 164.82 KB

Author(s)

Storm, Wolfgang

;

Vandervorst, Wilfried

;

Vanhaelemeersch, Serge

;

Baklanov, Mikhaïl

;

;

;

Statistics

1982 since deposited on 2021-09-30

Acq. date: 2026-05-30