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Spectroscopic study of polysilicon traps by means of fast capacitance transients

dc.contributor.authorToledano Luque, Maria
dc.contributor.authorTang, Baojun
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-20T17:01:48Z
dc.date.available2021-10-20T17:01:48Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21621
dc.sourceIIOimport
dc.titleSpectroscopic study of polysilicon traps by means of fast capacitance transients
dc.typeMeeting abstract
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference17th Workshop on Dielectrics in Microelectronics - WoDiM
dc.source.conferencedate25/06/2012
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access


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