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Strain relaxation and distribution in GaN nanopillars using in-plane X-ray diffraction
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Authors
Tseng, Peter
;
Dillemans, Leander
;
Gonzalez, Mario
;
Cheng, Kai
;
Borghs, Gustaaf
;
Lieten, Ruben
Conference
E-MRS Spring Meeting Symposium W: Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III
Title
Strain relaxation and distribution in GaN nanopillars using in-plane X-ray diffraction
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