dc.contributor.author | Tseng, Peter | |
dc.contributor.author | Dillemans, Leander | |
dc.contributor.author | Gonzalez, Mario | |
dc.contributor.author | Cheng, Kai | |
dc.contributor.author | Borghs, Gustaaf | |
dc.contributor.author | Lieten, Ruben | |
dc.date.accessioned | 2021-10-20T17:11:39Z | |
dc.date.available | 2021-10-20T17:11:39Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21640 | |
dc.source | IIOimport | |
dc.title | Strain relaxation and distribution in GaN nanopillars using in-plane X-ray diffraction | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Dillemans, Leander | |
dc.contributor.imecauthor | Gonzalez, Mario | |
dc.contributor.imecauthor | Borghs, Gustaaf | |
dc.contributor.imecauthor | Lieten, Ruben | |
dc.source.peerreview | no | |
dc.source.conference | E-MRS Spring Meeting Symposium W: Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III | |
dc.source.conferencedate | 14/05/2012 | |
dc.source.conferencelocation | Strasburg France | |
imec.availability | Published - imec | |