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Local compressive stress generation in electron irradiated boron-doped Si0.75Ge0.25/Si devices
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Authors
Tsunoda, Isao
;
Nakashima, Toshiyuki
;
Naka, Noboyuki
;
Idemoto, Tatsuya
;
Yoneoka, Masahi
;
Takakura, Kenichiro
;
Yoshino, Kenji
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Claeys, Cor
;
Ohyama, Hidenori
ISSN
1610-1634
Issue
10_11
Journal
Physica Status Solidi C
Volume
9
Title
Local compressive stress generation in electron irradiated boron-doped Si0.75Ge0.25/Si devices
Publication type
Journal article
Embargo date
9999-12-31
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