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Articles
Non-oxidizing solvent-based strip of ion implanted photoresist
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Non-oxidizing solvent-based strip of ion implanted photoresist
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tsvetanova, Diana
;
Vos, Rita
;
Vanstreels, Kris
;
Radisic, Dunja
;
Sonnemans, Roger
;
Berry, Ivan
;
Waldfried, Carlo
;
Mattson, David
;
DeLuca, J
;
Vereecke, Guy
;
Mertens, Paul
;
Parac-Vogt, Tatjana
;
Heyns, Marc
Journal
Solid State Phenomena
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1939
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1939
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-11
Citations