2D and 3D photoresist line roughness characterization

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Authors
Vaglio Pret, Alessandro; Gronheid, Roel; Kunnen, Eddy; Pargon, Erwine; Luere, Olivier; Bianchi, Davide
Conference
38th International Micro & Nano Engineering Conference - MNE
Title
2D and 3D photoresist line roughness characterization
Publication type
Oral presentation
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