Publication:
Linking EUV lithography line edge roughness and 16 nm NAND memory performance
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1927 since deposited on 2021-10-20
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Acq. date: 2026-07-15
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Statistics
Views
1927 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-07-15
Citations