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Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVereecke, Bart
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorKashiwagi, Yusaku
dc.contributor.authorKe, Xiaoxing
dc.contributor.authorCott, Daire
dc.contributor.authorVanpaemel, Johannes
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-20T17:38:52Z
dc.date.available2021-10-20T17:38:52Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21696
dc.sourceIIOimport
dc.titleElectrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access


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