Probing dopant, carrier and impurity distributions in small 3D-structures and confined volumes with SIMS, Atomprobe Tomography, SSRM and C-AFM

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Authors
Vandervorst, Wilfried
Conference
Small Volume Analysis
Title
Probing dopant, carrier and impurity distributions in small 3D-structures and confined volumes with SIMS, Atomprobe Tomography, SSRM and C-AFM
Publication type
Oral presentation
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