Publication:
Probing dopant, carrier and impurity distributions in small 3D-structures and confined volumes with SIMS, Atomprobe Tomography, SSRM and C-AFM
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1826 since deposited on 2021-10-20
1last month
Acq. date: 2026-05-19
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Statistics
Views
1826 since deposited on 2021-10-20
1last month
Acq. date: 2026-05-19
Citations