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A study of blister formation in ALD Al2O3 grown on silicon

dc.contributor.authorVermang, Bart
dc.contributor.authorGoverde, Hans
dc.contributor.authorSimons, Veerle
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorTanaku, Shuji
dc.contributor.authorJohn, Joachim
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-20T18:26:54Z
dc.date.available2021-10-20T18:26:54Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21788
dc.sourceIIOimport
dc.titleA study of blister formation in ALD Al2O3 grown on silicon
dc.typeProceedings paper
dc.contributor.imecauthorVermang, Bart
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1135
dc.source.endpage1138
dc.source.conference38th IEEE Photovoltaic Specialists Conference - PVSC
dc.source.conferencedate3/06/2012
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - open access


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