Secondary ion signal variation during oxygen build-up in Si

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Authors
Tian, Chunsheng; Beyer, Gerald; Vandervorst, Wilfried; Kilner, J. A.
Conference
Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference
Title
Secondary ion signal variation during oxygen build-up in Si
Publication type
Proceedings paper
Embargo date
9999-12-31
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