Publication:
15nm half-pitch patterning: EUV + SELF-aligned double patterning
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2079 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-06
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Metrics
Views
2079 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-06
Citations