CVD epitaxial growth of GeSn opens a new route for advanced Sn-based logic and photonics devices

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Author(s)

Vincent, Benjamin

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Gencarelli, Federica

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;

Vantomme, Andre

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Merckling, Clement

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Afanasiev, Valeri

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;

Clarysse, Trudo

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Firrincieli, Andrea

;

Vandervorst, Wilfried

;

Dekoster, Johan

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;

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1980 since deposited on 2021-10-20

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Acq. date: 2025-10-25