Authors

Vincent, Benjamin; Gencarelli, Federica; Kumar, Arul; Vantomme, Andre; Merckling, Clement; Lin, Dennis; Afanasiev, Valeri; Eneman, Geert; Clarysse, Trudo; Firrincieli, Andrea; Vandervorst, Wilfried; Dekoster, Johan; Loo, Roger; Caymax, Matty

Conference

6th International Silicon- Germanium Technology and Device Meeting - ISTDM

Title

CVD epitaxial growth of GeSn opens a new route for advanced Sn-based logic and photonics devices

Publication type

Proceedings paper