Authors

Vincent, Benjamin; Witters, Liesbeth; Richard, Olivier; Hikavyy, Andriy; Bender, Hugo; Loo, Roger; Caymax, Matty; Thean, Aaron

Conference

SiGe, Ge, and Related Compunds 5: Materials, Processing, and Devices

Title

Selective growth of strained GE channel on relaxed SiGe buffer in shallow trench isolation for high mobility Ge planar and Fin pFET

Publication type

Proceedings paper

Embargo date

9999-12-31