Authors

Wang, Bo; Tanaka, Shuji; De Coster, Jeroen; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid

Conference

19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA

Title

Comparison of three methods to measure the internal pressure of empty MEMS packages

Publication type

Proceedings paper