Authors

Trauwaert, Marie-Astrid; Vanhellemont, Jan; Lambert, U.; Gräf, D.; Kenis, Karine; Mertens, Paul; Heyns, Marc

Conference

Proceedings of the 7th International Autumn Meeting : Gettering and Defect Engineering in Semiconductor Technology - GADEST '97

Title

Differential interference contrast microscopy of defects in As-grown and annealed Si wafers

Publication type

Proceedings paper

Embargo date

9999-12-31