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Integration of a k=2.3 spin-on polymer for the sub-28nm technology node

dc.contributor.authorWilson, Chris
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorTruffert, Vincent
dc.contributor.authorKirimura, Tomoyuki
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorHirai, M.
dc.contributor.authorNakatani, K.
dc.contributor.authorTada, M.
dc.contributor.authorHeylen, Nancy
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVan Besien, Els
dc.contributor.authorCiofi, Ivan
dc.contributor.authorStucchi, Michele
dc.contributor.authorCroes, Kristof
dc.contributor.authorZhang, Liping
dc.contributor.authorDemuynck, Steven
dc.contributor.authorErcken, Monique
dc.contributor.authorXu, Kaidong
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-20T18:59:45Z
dc.date.available2021-10-20T18:59:45Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21851
dc.sourceIIOimport
dc.titleIntegration of a k=2.3 spin-on polymer for the sub-28nm technology node
dc.typeProceedings paper
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorTruffert, Vincent
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecTruffert, Vincent::0000-0001-7851-830X
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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