Authors

Xie, Qi; Deng, Shaoren; Schaekers, Marc; Lin, Dennis; Caymax, Matty; Delabie, Annelies; Qu, Xin-Ping; Jiang, Yu-long; Deduytsche, Davy; Detavernier, Christophe

ISSN

0268-1242

Issue

7

Journal

Semiconductor Science and Technology

Volume

27

Title

Germanium surface passivation and atomic layer deposition of high- k dielectrics - a tutorial review on Ge-based MOS capacitors

Publication type

Journal article