Authors

Xie, Weiqiang; Fiers, Martin; Selvaraja, Shankar; Van Campenhout, Joris; Absil, Philippe; Van Thourhout, Dries

Conference

Proceedings of the Annual Symposium of the IEEE Photonics Society Benelux Chapter

Title

High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography

Publication type

Proceedings paper

Embargo date

9999-12-31