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Arsenic-doped Ge-spiked monoemitter SiGe:C heterojunction bipolar transistors by low-temperature trisilane based chemical vapor deposition
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Authors
You, Shuzhen
;
Decoutere, Stefaan
;
Nguyen, Duy
;
Van Huylenbroeck, Stefaan
;
Sibaja-Hernandez, Arturo
;
Venegas, Rafael
;
Loo, Roger
;
De Meyer, Kristin
ISSN
0040-6090
Issue
8
Journal
Thin Solid Films
Volume
520
Title
Arsenic-doped Ge-spiked monoemitter SiGe:C heterojunction bipolar transistors by low-temperature trisilane based chemical vapor deposition
Publication type
Journal article
Embargo date
9999-12-31
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