Authors

Zanaty, Mohamed; Jansen, Roelof; Rochus, Veronique; Abbas, Mohamed; Witvrouw, Ann; Tilmans, Harrie; Rottenberg, Xavier

Conference

23rd Micromechanics and Microsystems Europe Conference

Title

Influence of the nonlinearity introduced by the Van der Waals force on the behaviour of NEM resonators

Publication type

Proceedings paper