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Influence of the nonlinearity introduced by the Van der Waals force on the behaviour of NEM resonators

dc.contributor.authorZanaty, Mohamed
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorAbbas, Mohamed
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-20T19:29:46Z
dc.date.available2021-10-20T19:29:46Z
dc.date.issued2012-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21908
dc.sourceIIOimport
dc.titleInfluence of the nonlinearity introduced by the Van der Waals force on the behaviour of NEM resonators
dc.typeProceedings paper
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.conference23rd Micromechanics and Microsystems Europe Conference
dc.source.conferencedate9/09/2012
dc.source.conferencelocationIlmenau Germany
dc.identifier.urlhttp://www.tu-ilmenau.de/fileadmin/media/mme2012/Proceedings/Session_D/D05_1661_MME2012_120730.pdf
imec.availabilityPublished - imec
imec.internalnotesNo CD available , only USB stick memory


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