Ultra low-k dielectrics damage under VUV and EUV radiation

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Authors
Zyryanov, S.; Braginsky, O.; Kovaev, A.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Baklanov, Mikhaïl
Conference
65th Gaseous Electronics Conference
Title
Ultra low-k dielectrics damage under VUV and EUV radiation
Publication type
Meeting abstract
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