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Ultra low-k dielectrics damage under VUV and EUV radiation

dc.contributor.authorZyryanov, S.
dc.contributor.authorBraginsky, O.
dc.contributor.authorKovaev, A.
dc.contributor.authorLopaev, D.
dc.contributor.authorMankelevich, Y.
dc.contributor.authorRakhimova, T.
dc.contributor.authorRakhimov, A.
dc.contributor.authorVasilieva, A.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-20T19:46:34Z
dc.date.available2021-10-20T19:46:34Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21940
dc.sourceIIOimport
dc.titleUltra low-k dielectrics damage under VUV and EUV radiation
dc.typeMeeting abstract
dc.source.peerreviewyes
dc.source.beginpageCT2.00005
dc.source.conference65th Gaseous Electronics Conference
dc.source.conferencedate22/10/2012
dc.source.conferencelocationAustin USA
imec.availabilityPublished - imec


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