Authors

Adelmann, Christoph; Cuypers, Daniel; Tallarida, Massimo; Rodriguez, Leonard; De Clercq, Astrid; Friedrich, Daniel; Conard, Thierry; Delabie, Annelies; Seo, Jin Won; Locquet, Jean-Pierre; De Gendt, Stefan; Schmeisser, Dieter; Van Elshocht, Sven; Caymax, Matty

DOI

10.1021/cm304070h

ISSN

0897-4756

Issue

7

Journal

Chemistry of Materials

Volume

25

Title

Surface chemistry and interface formation during the atomic layer deposition of alumina from trimethyl aluminum and water on indium phosphide

Publication type

Journal article