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Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics

dc.contributor.authorArmini, Silvia
dc.contributor.authorSun, Yiting
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorBaumans, Kim
dc.contributor.authorDe Cooman, Johan
dc.contributor.authorRedzheb, Murad
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorSwerts, Johan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorStruyf, Herbert
dc.date.accessioned2021-10-21T06:42:50Z
dc.date.available2021-10-21T06:42:50Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21982
dc.sourceIIOimport
dc.titleSelf-assembled monolayers assisted pore sealing of k 2.0 dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorBaumans, Kim
dc.contributor.imecauthorDe Cooman, Johan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage125
dc.source.endpage126
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate11/03/2013
dc.source.conferencelocationLeuven belgium
imec.availabilityPublished - open access
imec.internalnotesP4-14


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