Publication:

Challenges for scaled damascene interconnects

Date

2013

Meeting abstract

Simple item page Full metadata Statistics

Files

28305.pdf 15.6 KB

Author(s)

;

;

Siew, Yong Kong

;

Vereecken, Philippe

;

Boemmels, Juergen

;

Struyf, Herbert

;

Statistics

1883 since deposited on 2021-10-21

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Acq. date: 2026-04-07