Publication:

Challenges for scaled damascene interconnects

Date

2013

Meeting abstract

Simple item page Full metadata Statistics

Files

28305.pdf 15.6 KB

Author(s)

;

;

Siew, Yong Kong

;

Vereecken, Philippe

;

Boemmels, Juergen

;

Struyf, Herbert

;

Statistics

1881 since deposited on 2021-10-21

Acq. date: 2026-02-24