Challenges for scaled damascene interconnects

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Authors
Armini, Silvia; Swerts, Johan; Siew, Yong Kong; Vereecken, Philippe; Boemmels, Juergen; Struyf, Herbert; Tokei, Zsolt
Conference
ECS Fall Meeting
Title
Challenges for scaled damascene interconnects
Publication type
Meeting abstract
Embargo date
9999-12-31
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