Show simple item record

Challenges for scaled damascene interconnects

dc.contributor.authorArmini, Silvia
dc.contributor.authorSwerts, Johan
dc.contributor.authorSiew, Yong Kong
dc.contributor.authorVereecken, Philippe
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-21T06:42:52Z
dc.date.available2021-10-21T06:42:52Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21983
dc.sourceIIOimport
dc.titleChallenges for scaled damascene interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSiew, Yong Kong
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2057
dc.source.conferenceECS Fall Meeting
dc.source.conferencedate26/10/2013
dc.source.conferencelocationSan francisco, CA USA
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2013-02/32/2057.abstract
imec.availabilityPublished - open access
imec.internalnotesAbstracts; Vol. MA2013-02


Files in this item

Thumbnail
Name:
28305.pdf
Size:
15.60Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record