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Radiation tolerance of Si1-yCy source/drain n-MOSFETs with different carbon concentrations
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Authors
Asai, Yuki
;
Hori, Masato
;
Yoneda, Masashi
;
Tsunoda, Isao
;
Takakura, Kenichiro
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Claeys, Cor
;
Yoshino, Kenji
Conference
8th International conference on Silicon Epitaxy and Heterostructures - ICSI-8
Title
Radiation tolerance of Si1-yCy source/drain n-MOSFETs with different carbon concentrations
Publication type
Proceedings paper
Embargo date
9999-12-31
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