Reliability characteristics of thin porous low-k silica-based interconnect dielectrics

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Authors
Barbarin, Yohan; Croes, Kristof; Roussel, Philippe; Li, Yunlong; Verdonck, Patrick; Baklanov, Mikhaïl; Tokei, Zsolt; Zhao, Larry
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
Reliability characteristics of thin porous low-k silica-based interconnect dielectrics
Publication type
Proceedings paper
Embargo date
9999-12-31
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