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Defect assessment and leakage control in Ge pFET junctions

dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorWang, Gang
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-21T06:44:33Z
dc.date.available2021-10-21T06:44:33Z
dc.date.issued2013-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22018
dc.sourceIIOimport
dc.titleDefect assessment and leakage control in Ge pFET junctions
dc.typeMeeting abstract
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceE-MRS Fall Meeting Symp. A: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques & Applications
dc.source.conferencedate16/09/2013
dc.source.conferencelocationWarsaw Poland
imec.availabilityPublished - open access


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