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Conference contributions
Defect assessment and leakage control in Ge pFET junctions
Publication:
Defect assessment and leakage control in Ge pFET junctions
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Date
2013
Meeting abstract
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27366.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Eneman, Geert
;
De Jaeger, Brice
;
Wang, Gang
;
Loo, Roger
;
Claeys, Cor
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1958
since deposited on 2021-10-21
Acq. date: 2026-07-26
Citations
Statistics
Views
1958
since deposited on 2021-10-21
Acq. date: 2026-07-26
Citations