Publication:

Defect assessment and leakage control in Ge pFET junctions

Date

2013-09
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorWang, Gang
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-21T06:44:33Z
dc.date.available2021-10-21T06:44:33Z
dc.date.embargo9999-12-31
dc.date.issued2013-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22018
dc.source.conferenceE-MRS Fall Meeting Symp. A: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques & Applications
dc.source.conferencedate16/09/2013
dc.source.conferencelocationWarsaw Poland
dc.title

Defect assessment and leakage control in Ge pFET junctions

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
27366.pdf
Size:
31.58 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions