Si/SiGe resonant interband tunnel diodes grown by large-area chemical vapor deposition

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Authors
Berger, Paul R.; Ramesh, Anisha; Loo, Roger
DOI
10.1149/05809.0081ecst
Conference
ULSI Process Integration 8
Title
Si/SiGe resonant interband tunnel diodes grown by large-area chemical vapor deposition
Publication type
Proceedings paper
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