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Effect of VUV and EUV radiation on utra low-k materials damage

dc.contributor.authorBraginsky, O.
dc.contributor.authorKovalev, A.
dc.contributor.authorLopaev, D.
dc.contributor.authorMankelevich, Y.
dc.contributor.authorProshina, O.
dc.contributor.authorRakhimova, T.
dc.contributor.authorRakhimov, A.
dc.contributor.authorVasilieva, A.
dc.contributor.authorZyryanov, S.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T06:49:20Z
dc.date.available2021-10-21T06:49:20Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22073
dc.sourceIIOimport
dc.titleEffect of VUV and EUV radiation on utra low-k materials damage
dc.typeProceedings paper
dc.source.peerreviewyes
dc.source.beginpageAA03.11
dc.source.conferenceAdvanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability
dc.source.conferencedate1/04/2013
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://journals.cambridge.org/action/di
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings: Vol. 1559


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