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The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

dc.contributor.authorCelano, Umberto
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorRichard, Olivier
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T06:53:38Z
dc.date.available2021-10-21T06:53:38Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22110
dc.sourceIIOimport
dc.titleThe unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
dc.typeProceedings paper
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage152
dc.source.endpage153
dc.source.conference18th Conference of Insulting Films on Semiconductors - INFOS: Book of Abstracts
dc.source.conferencedate25/06/2013
dc.source.conferencelocationKrakow Poland
imec.availabilityPublished - open access


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