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Tuned electrostatic probe for RF plasma diagnostics
Publication:
Tuned electrostatic probe for RF plasma diagnostics
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Date
2013
Proceedings Paper
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27350.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Cirino, Giuseppe
;
Castro, Raul
;
Pisani, Marcelo
;
Verdonck, Patrick
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Abstract
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1854
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Acq. date: 2025-12-16
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Views
1854
since deposited on 2021-10-21
1
last month
Acq. date: 2025-12-16
Citations