dc.contributor.author | Cirino, Giuseppe | |
dc.contributor.author | Castro, Raul | |
dc.contributor.author | Pisani, Marcelo | |
dc.contributor.author | Verdonck, Patrick | |
dc.date.accessioned | 2021-10-21T06:59:27Z | |
dc.date.available | 2021-10-21T06:59:27Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22151 | |
dc.source | IIOimport | |
dc.title | Tuned electrostatic probe for RF plasma diagnostics | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1 | |
dc.source.endpage | 4 | |
dc.source.conference | Symposium on Microelectronics Technology and Devices - SBMICRO | |
dc.source.conferencedate | 2/09/2013 | |
dc.source.conferencelocation | Curitiba Brazil | |
dc.identifier.url | http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6676142 | |
imec.availability | Published - open access | |