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Vertical polysilicon pinch-off FET for 3D memory technology: feasibility and electrical performance
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Authors
Congedo, Gabriele
;
Toledano Luque, Maria
;
Arreghini, Antonio
;
Kar, Gouri Sankar
;
Tang, Baojun
;
Degraeve, Robin
;
Van Aerde, Steven
;
Kim, Woosik
;
Van den Bosch, Geert
;
Van Houdt, Jan
Conference
International Memory Workshop - IMW
Title
Vertical polysilicon pinch-off FET for 3D memory technology: feasibility and electrical performance
Publication type
Proceedings paper
Embargo date
9999-12-31
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