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Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLing, Fangzhou
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-21T07:08:04Z
dc.date.available2021-10-21T07:08:04Z
dc.date.issued2013-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22203
dc.sourceIIOimport
dc.titleDedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage2692
dc.source.endpage2695
dc.source.conference17th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate16/06/2013
dc.source.conferencelocationBarcelona Spain
imec.availabilityPublished - imec


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