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Delamination in BEOL: analysis of interface failure by combined experimental & modeling approaches
Publication:
Delamination in BEOL: analysis of interface failure by combined experimental & modeling approaches
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Date
2013
Proceedings Paper
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26578.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Debecker, Bjorn
;
Vanstreels, Kris
;
Gonzalez, Mario
;
Vandevelde, Bart
Journal
Abstract
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1850
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Acq. date: 2025-12-17
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Views
1850
since deposited on 2021-10-21
3
last month
Acq. date: 2025-12-17
Citations