Show simple item record

Delamination in BEOL: analysis of interface failure by combined experimental & modeling approaches

dc.contributor.authorDebecker, Bjorn
dc.contributor.authorVanstreels, Kris
dc.contributor.authorGonzalez, Mario
dc.contributor.authorVandevelde, Bart
dc.date.accessioned2021-10-21T07:13:16Z
dc.date.available2021-10-21T07:13:16Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22233
dc.sourceIIOimport
dc.titleDelamination in BEOL: analysis of interface failure by combined experimental & modeling approaches
dc.typeProceedings paper
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage5C.2
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate14/04/2013
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
26578.pdf
Size:
397.3Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record