CMOS technology development vehicle for bulk FinFET N10/N7

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Authors
Dehan, Morin; Boemmels, Juergen; Horiguchi, Naoto; Van der Plas, Geert
Conference
9th International Nanotechnology Conference on Communication and Cooperation - INC9
Title
CMOS technology development vehicle for bulk FinFET N10/N7
Publication type
Oral presentation
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