dc.contributor.author | Dehan, Morin | |
dc.contributor.author | Boemmels, Juergen | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Van der Plas, Geert | |
dc.date.accessioned | 2021-10-21T07:15:16Z | |
dc.date.available | 2021-10-21T07:15:16Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22243 | |
dc.source | IIOimport | |
dc.title | CMOS technology development vehicle for bulk FinFET N10/N7 | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Boemmels, Juergen | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Van der Plas, Geert | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
dc.source.peerreview | no | |
dc.source.conference | 9th International Nanotechnology Conference on Communication and Cooperation - INC9 | |
dc.source.conferencedate | 15/05/2013 | |
dc.source.conferencelocation | Berlijn Germany | |
imec.availability | Published - imec | |