Deposition processes for the fabrication of epitaxial Si-O superlattices

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Authors
Delabie, Annelies; Jayachandran, Suseendran; Maggen, Jens; Meersschaut, Johan; Caymax, Matty; Loo, Roger; Vandervorst, Wilfried; Heyns, Marc
Conference
8th International Conference on Silicon Epitaxy and Heterostructures - ICSI-8
Title
Deposition processes for the fabrication of epitaxial Si-O superlattices
Publication type
Proceedings paper
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